Ultra-fast semiconductor device and thin-film characterization in 3D at the nanoscale
Downloads Ultra-fast semiconductor device and thin-film characterization in 3D at the nanoscale (PDF, 212 KB) Atomic Force Microscope (AFM) can be used to look at a variety of microfabricated devices ranging from microfluidics and photonics crystals to semiconductor devices. With the nGauge AFM, it is possible to easily obtain a three-dimensional image of the sample…